Electroglas 2001 prober manual muscle

Electroglas 1034 prober the electroglas 1034 eg 1034xa and eg 1034x6a automatic wafer prober is a precision instrument for testing and classifying semiconductor devices in wafer form. The model 3001 wafer prober system is a flexible onwafer probe system that helps you produce integrity data and achieve handsoff productivity. A wafer prober is a machine automatic test equipment used to test integrated circuits. Page 5, electroglas prober miscellaneous spare parts. Electroglas prober to serial port interface parallax forums. Emts, inc offers service and support for most electroglas makes and models east of the mississippi. This tool is designed to provide a high throughput. Mvts technologies acquires electroglas wafer prober assets. Reliable mechanical and electrical connections between the tester and the prober. Back then the idea of an automatic steptestandrepeat wafer prober in three dimensions with five degrees of freedom was still somewhat alien to the manually oriented jobshop approach of most fab lines. Offers integration services to assist our customers in combining products from several companies into one system. Exceptionally low energy consumptions, usually 20% to 40% less than other designs.

We work with many of the old electroglas vendors and some of the current aftermarket suppliers of spare parts. The prober driver prober provides a complete set of commands to set up and control the wafer prober via the gpib or rs232 interface. This technical manual contains the infonnation necessary to install, operate, and maintain the electroglas 1034x automatic wafer prober. Proven solutions for the fast, accurate probing of 200mm and 300mm wafers. Appendix a electroglas eg2001201030014085 prober information. By adopting pfc patent xy compensation and profiling function, pcp102ws can compensate the position even if a wafer is warped. The 2000 eg 2001,eg 2010,eg 2080 manual series wafer probers are extremely accurate, modularly designed automatic wafer probers, configured to perform automatic system functions of. Nov 30, 2012 the 2000 eg 2001,eg 2010,eg 2080 series wafer probers are controlled and operated through the use of two consoles the operators console and the monitor console, simple pushbutton controls. Unfortunately i find no descriptions in this manual regarding the electroglas prober behavior as regards status byte bits. Miscellaneous electroglas prober spare parts, page 5. We do not have the expertise to fully test this unit and have documented all the information gathered from it in this. For lci applications, the sample arm may be terminated by an optical probe comprising a cleaved angled, flat, or polished optical fiber or free space beam. We boast one of the largest inventories of semiconductor handlers and testers. Mvts technologies acquires electroglas wafer prober assets from zenovus pte.

Pcp102wswafer probersproductsplum five semiconductor. These prober products have advanced automation including probe to pad. S530 parametric test systems prober and prober driver manual. Electroglas service partsaccessoriesproductsplum five. Electroglas horizon 4085x oem manual for your reference sn. Electroglas to move wafer prober production to singapore from san. It may be wholly or partially applicable to your 4080 prober. Formed to help a major semiconductor manufacturer solve a problem with their probe cleaning process. Backed by 40 years of experience and a dedicated team of experts, electroglas worldclass wafer probers, test handlers and test floor management solutions give you the capabilities and intelligence you need to get faster answers to questions about device quality. In this implementation quasi97 is the master software controlling the overall test sequence, and egwafer module is the driver. Electroglas model x automatic wafer prober system vo. Cant read gpib status byte from electroglas 4080 prober ni. The electroglas 2001 prober eg 2001x, eg 2001cx wafer prober station may be seen in other configurations, including any of the following options.

Please call 8566974400 or write jmc for more information about our eg 2001 prober. Electroglas model 3001 wafer prober system section time line exhibits people hall of fame organizations learn. Please contact us if you are interested in the equipment list. Mektra specializes in the rebuilding, custom modification and servicing of semiconductor testing equipment. Home manufacturer electroglas xynetics electroglas xynetics 1034x wafer prober with station. Effects of zstage motion control on probe contact force. The tester interface is straight eg 2000 series for ease of communication and the wafer handling is reliable and safe because we use the standard genmark. Following its acquisition of electroglas s intellectual property, martek, inc. The electroglas horizon 4085x automatic wafer prober system is a precision wafer positioning system capable of positioning for probe 5 through 8 wafers 125mm 200mm. Genuine electroglas prober parts complete probe solutions. The invention relates to a system and method for graphically displaying ontology data. Martek is a dedicated global supplier of new and refurbished wafer probers to. It includes the cables and accessories listed below and pictured. The martek refurbished line of wafer probers includes electroglas 2001, 3001.

Electroglas eg 4080 automatic wafer proberjmc worldwide. Electroglas 4090 series probers comprehensive parts list. Wafer probers are commonly employed when it is necessary to acquire large amounts of test data. The electroglas 2000 series wafer prober station have been available in variety of everexpanding configurations, depending on the needs of the user.

However, once the wafer is on the chuck, profiled and aligned the egwafer application takes over and commands the prober xy positions to move for testing. Egwafer users manual integral solutions intl march 30, 2010 page 3 1 introduction this document describes the set up and operation of isi wafer level analyzer wla based on electroglass horizon 4080 wafer prober. Information about the following probers is contained in this manual. The model eg 1034x eg 1034xa and eg 1034x6a is a selfcontained system comprising two modules, a prober module and a power module. The electroglas 2001x automatic wafer probers, for 75 mm to 150 mm diameter wafers, combine high performance and reliability in a costeffective package. The invention includes displaying assertions as conceptrelationshipconcept triplets. The tool is typically employed to automatically load, align, and probe multiple locations on a wafer or series of wafers. The invention also includes displaying ontologies, or parts thereof, as directed graphs capable of cyclic paths. If you are having problems with your machine feel free to call and get free technical support over the phone. If you are looking to buy or sell second hand electroglas, please visit equipmatching. Appendix b electroglas 4060408040905300 prober information. For electrical testing a set of microscopic contacts or probes called a probe card are held in place whilst the wafer, vacuummounted on a wafer chuck, is moved into electrical contact. The sale of a service part will end when the stock has been sold out. One example is our robot 2010 wafer prober which combines a genmark gencobot robot with an electroglas 2001 prober which can handle 2 inch through 8 inch wafers and has 6 cassette platforms.

Our goal is to offer you high quality parts at a reasonable price. Furthermore, the invention includes displaying ontologies, or parts thereof, in clustered cone graphs. The end of the video shows the ets software front end running. The prober is the machine at the beginning of the video, with the bs2 interface board at the bottom left of the screen. The wafer prober and egwafer are the primary topics of this manual. Full text of official gazette of the united states patent. This emtselectroglas 2001x ps automatic wafer prober is used and in excellent condition. Spec equipment electroglas xynetics 1034x wafer prober with. We are selling service parts for the probers of electroglas. Electroglas 2001 x prober, 6 6 gold chuck high voltage upgrade 1 kv grounding shielding autoloader unloader belt track 4, 5 and 6 wafer capable xy motion with air. June 2001 4 introduction esa probesolutions probesolutions an extension of esa into the semiconductor test arena. Net drivers for wafer probers from electroglas, tokyo elelectron tel, accretech tsk, and cascade microtech. Coldtop melters with superstructure temperatures typically less than 125 deg. Codeveloped a bolton product to enhance prober capability.